TFT-LCD Clean Stocker System

Features

Stocker is being used by semiconductor and TFT - LCD manufature to store and buffer cassette with substrates in process.
Since an important function of stocker is to keep the contained material clean, the only way to keep the stored product clean is to provide contant clean airflow through stocker.
This system consists of input and output conveyor for loading and unloading of cassettes, shelf for storage of cassettes, stacker machine(robot) to transfer cassette between conveyor and rack, and airflow system to maintain cleanness inside stocker.