Stocker Machine

Concept for Stocker System

• Developed and installde for 5" generation TFT-LCD
• High speed High reliability stacker Direct wheel driver
  Max. 120m/min speed (with cassette)
  Max 150kg cassette transport with 8sec Forking Time
• Non- contact power supply eliminate particle source
• New air contril methods Guarantee 0.1μ class 10 without side fan filter unit static pressure regain theory
• Taller stocker(Above 7m) high space effciency

Concept for Stocker Controller

• Easy to operation with Graphic Use Interface and Touch Monitor
• SEMI international standard communication with MCS
• Use WIN2000 NT for OS
• Non-stop operation during correcting system
• Easy to maintenance with error message log
• Password for security
• Teaching pendant for operating units